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Catching semiconductor defects earlier than they multiply


Credit score: Jeremy Waterhouse, Pexels

From smartphones to laptops, in right now’s digital world, we depend on connectivity. One of many elements underlying the sleek operation of those machines are silicon chips—semiconductors, that are a vital a part of digital circuits. They’re additionally costly.

As expertise scaling continues, it allows smaller, sooner and vitality environment friendly electronics. Machine dimensions are approaching the scale of an atom, and with smaller prototypes, sustaining the identical quantity of manufacturing output as earlier than has change into difficult. The last word impact? Larger prices, which inevitably will get handed on to the buyer.

New methods of identification and mitigation should be developed to maintain manufacturing of semiconductors environment friendly and preserve units, reminiscent of computer systems and smartphones extra reasonably priced. Assad Oberai, Hughes Professor within the USC Viterbi Division of Aerospace and Mechanical Engineering and interim vice dean of analysis for the college, and his colleagues have designed a deep studying algorithm that may determine defects in semiconductors, classify these defects and in addition map them as they happen.

“Think about wiring a home. If there’s one brief circuit, then the entire system would not work. The identical factor applies right here,” he mentioned.

As an alternative of ready for defects to happen and replicate throughout a batch, he means that this deep studying algorithm can be utilized to flag points as they occur. In analysis revealed within the Journal of Micro/Nanolithography, Oberai, his graduate pupil Dhruv Patel, and Ravi Bonam, a semiconductor expertise researcher at IBM Analysis, used a deep studying algorithm to determine defects once they happen. For instance, think about a strong line is being printed. If there’s a break in that line, it could be thought of incomplete or faulty. The can determine when such a break happens and in addition the place precisely the break is situated.

Patel, a USC Viterbi Ph.D. pupil in , was additionally part of the analysis crew and received Honorable Point out for Greatest Pupil Paper on the SPIE Lithography Convention held in February 2019 for this work, co-authored with Oberai and Bonam.

The way it works

With semiconductor manufacturing, similar to in another manufacturing course of, something can go incorrect. “You’ll be able to find yourself with one thing you did not need, and on this case, these defects would imply that individual chip is ineffective and needs to be thrown out,” Oberai mentioned.

“The instruments that exist proper now for doing this are very empirical or rules-based and subsequently not very adaptable. For those who print one circuit after which print a special circuit, you must return and tweak the principles manually to ensure it should work once more,” Oberai mentioned. He additionally mentioned that present instruments decide up many false positives, that means areas that are not faulty can be flagged and seemed into. However alternately, for those who’re not conservative, you will miss out on fairly a couple of defects.

“The tradeoff between sensitivity and specificity is a troublesome one. You do not need to find yourself with defects, however you additionally do not need to spend time and assets inspecting false positives,” Oberai mentioned.

Within the analysis, achieved in partnership with IBM, the crew was in a position to obtain each excessive sensitivity (97%) and excessive specificity (100%), together with fast and correct defect localization.

Bonam mentioned, “We’re very inspired by these outcomes and this collaboration with academia signifies IBM Analysis’s dedication to fundamentals to realize deep experience in A.I. expertise.”

The crew achieved this by coaching the algorithm on a set of over 500 e-beam photos (photos created utilizing electron expertise that reveals microscopic structural particulars)containing defects from three defect courses. Of those, about 40% had a single line breaks (defects masking a single line), 20% had multi-line breaks (defects span a number of strains) and 40% had been defect-free.

Alongside the best way, the crew discovered that localization of the defect was a byproduct of the coaching. In different phrases, the identical course of that helped the algorithm determine and classify a defect allowed it to additionally uncover the place the defect was situated.

Take a picture and overlay it with a 20×20 grid, Oberai mentioned. For every sub-region on this grid, you may ask the algorithm, was this area necessary in deciding whether or not or not there was a defect? “We repeated this query for each sub-region, and located that the area most necessary in making the choice on whether or not or not the semiconductor was faulty was additionally the area that housed the road break,” Oberai mentioned.

Regardless of excessive accuracy in detecting defects, Oberai notes that the algorithm fails whether it is educated for one kind of sample and utilized to a different. One work round, he mentioned, is to infuse a small proportion of knowledge from the brand new sample to carry the algorithm alongside in having the ability to determine it. They discovered in the event that they used 80% of the previous sample and 20% from the brand new sample and combined them up, accuracy improved considerably.

Nonetheless, Oberai hopes to enhance this course of within the subsequent section of this analysis. “To me that’s nonetheless unsatisfactory—the truth that you must retrain it so considerably,” Oberai mentioned. As an alternative, he hopes they’ll create an algorithm that does not should be educated in a supervised means in any respect. “Think about a case the place you give me 1000’s of photos and say there isn’t any defect on this picture and provides me nothing else. After that you just give me photos which will or might not have defects, then the will mechanically flag photos which have defects.”


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Extra data:
Dhruv V. Patel et al. Deep learning-based detection, classification, and localization of defects in semiconductor processes, Journal of Micro/Nanolithography, MEMS, and MOEMS (2020). DOI: 10.1117/1.JMM.19.2.024801

Quotation:
Catching semiconductor defects earlier than they multiply (2020, June 17)
retrieved 17 June 2020
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